Lithium Sputtering, Deposition and Evaporation by Martin J. Neumann, Paperback, 9783639041897 | Buy online at Moby the Great

Lithium Sputtering, Deposition and Evaporation

Controlled Thin Film Engineering

Author: Martin J. Neumann  

New
Check delivery options

PRODUCT INFORMATION

Summary

The ability to selectively deposit thin films of lithium and remove them from surfaces is an emerging area of technology development in various fields including EUV lithography, lithium ion battery development, and in the fusion community. A lithium magnetron source was developed for lithium deposition and characterized to yield a mapping of the temperature and density of the plasma, ionization fraction, and lithium deposition. From here, a secondary plasma source was developed and studied in the same manner to also provide information on the electron density, temperature, and ionization fraction so as to accurately model and measure the deposition flux of lithium and sputter flux on the sample surface. The simultaneous process of deposition, evaporation, and sputtering of lithium is modeled and corroborated with experimental observations to develop a predictive model for the precise thickness of lithium thin films that can be engineered in any setting for any application.

Read more

Description

The ability to selectively deposit thin films of lithium and remove them from surfaces is an emerging area of technology development in va-rious fields including EUV lithography, lithium ion battery develop-ment, and in the fusion community. A lithium magnetron source was developed for lithium deposition and characterized to yield a mapping of the temperature and density of the plasma, ionization fraction, and lithium deposition. From here, a secondary plasma source was deve-loped and studied in the same manner to also provide information on the electron density, temperature, and ionization fraction so as to accurately model and measure the deposition flux of lithium and sputter flux on the sample surface. The simultaneous process of deposition, evaporation, and sputtering of lithium is modeled and corroborated with experimental observations to develop a predictive model for the precise thickness of lithium thin films that can be engineered in any setting for any application.

Read more

About the Author

Martin is from Pekin, IL and earned a BS in Nuclear Engineering from the University of Illinois at Urbana-Champaign. Pursuing his interest of plasma engineering and medicine, he joined the Center for Plasma Material Interactions to pursue a MD/PhD at Illinois and is involved with developing and integrating emerging technology with medicine.

Read more

Product Details

Publisher
VDM Verlag Dr. Mueller E.K.
Published
17th June 2008
Format
Paperback
Pages
192
ISBN
9783639041897

Returns

This item is eligible for simple returns within 30 days of delivery. Return shipping is the responsibility of the customer. See our returns policy for further details.

New
Check delivery options